The UCR Center for Nanoscale Science & Engineering Nanofabrication Cleanroom facility is located in the lower level of the B wing of Bourns Hall. It is a state-of-the-art Nanofabrication Research facility available 24/7 to qualified users. The facility is approximately 2,000 square feet and includes significant safety and operational monitoring capabilities.
At present, the Cleanroom is running and certified at Class 100 in the Photolithography bay, Class 1000 in the Thin Film/Etch bay and the environment is being controlled and monitored. There is a trained staff of 4 full-time engineers available to users at no charge from 9-5p.m. weekdays. Policies and procedures are in place and others are being generated and new users are being trained daily. There are currently 85 trained users conducting research in various fields of engineering and sciences from Physics, Chemical, Environmental, Mechanical and Electrical Engineering.
The following tools are presently available for training and/or use:
E-beam Lithography System
Focused Ion Beam System
Unaxis PECVD System
Rapid Thermal Anealer
STS Reactive Ion etcher
E-beam Evaporation
Sputter Evaporation
Thermal Evaporation
Dektak Profilometer
C/V Plotter
I/V Probe Station
Matrix Asher
Ellipsometer
Confocal Microscope
Atomic Force Microscope
Quintel Mask Aligner
Suss MA-6 Mask Aligner
Photoresist Spin Coat Station
Base Development Wet Bench
Solvent Wet Bench
For general questions regarding lab capabilities or becoming a user, please contact Mark Heiden at (951) 827-2551 or email:mheiden@engr.ucr.edu