Mark E. Heiden

Nanofabrication Facility Manager

Positions Held:

8/97-11/02
General Manager, Hi Q Engineering, Ontario, CA
8/92-7/97
Product Manager, MTI Technology Corp, Anaheim, CA
1/88-8/92
Special Projects Manager, Hi Q Engineering, Ontario, CA
8/82-1/88
Senior Production Manager, General Precision Ind., Irvine, CA
7/76-8/82
Technical Support Manager, Statek Corp., Orange, CA

Research Interests:

Nanoscale and MEMS device fabrication, Laboratory monitoring and management systems.

Professional Experience:

Over 25 years experience in all aspects of the quartz crystal device and MEMS sensor research
and development, design/test and manufacturing including:
Facilities design, construction and maintenance;
Photolithography;
Quality assurance and process control;
Equipment refurbish, design modification and maintenance;
Clean room design, construction and maintenance;
Process engineering/development;
Wafer grinding/polishing;
E-beam metallization;
Thermal metallization;
UV/Ozone cleaning;
Chemical etching;
Metrology

Email: mheiden@engr.ucr.edu
Extension: 2551